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> Shibukawa Plant
Mizushima Plant
Shibukawa Plant
Stretching from the banks of the Tonegawa River, the Shibukawa Plant primarily manufactures fluorochemicals and ferrochemicals. To meet burgeoning demand from the IT industry, we produce a line of fine chemicals based on fluorochemicals, including nitrogen trifluoride and tungsten hexafluoride and hexafluoro-1,3-butadiene for the semiconductor and liquid crystal industries. In 2001, we bolstered the main group of ferrochemicals manufactured at the plant with a new production line for reprographic carriers incorporating clean ferrite (EF Ferrite). This is one example of our swift response to changing market needs.

Area: approximately 138,000 square meters

Production equipment for Hexafluoro-1,3-butadiene Production equipment for carriers Control room for fluorochemicals production

Filling equipment for clean gases Iso container of fluorine- containing specialty gases Production equipment for high-purity sulfur hexafluoride

Products Manufactured at the Shibukawa Plant
Fluorochemicals
Sulfur hexafluoride Carbon tetrafluoride Tungsten hexafluoride
Nitrogen trifluoride Hexafluoro-1,3-butadiene Hexafluoroethane
Trifluoromethane Iodine pentafluoride Octafluoropropane
F-Torr Series Decomposition Equipment for PFCs    

Ferrochemicals
Carriers Magnetite